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Electronic material
Removal of oxygen from electronic materials by vapor-phase processes
Witold Palosz
, *
NASA, Marshall Space Flight Center, Space Sciences Laboratory,
ES75, Huntsville, Alabama 35812, USA
Received 22 July 1996;
accepted 27 September 1996. ; Available online 18 October 2001.
Thermochemical analyses of equilibrium partial pressures over oxides with and
without the presence of the respective element condensed phase, and hydrogen,
chalcogens, hydrogen chalcogenides, and graphite are presented. Theoretical
calculations are supplemented with experimental results on the rate of
decomposition and/or sublimation/vaporization of the oxides under dynamic
vacuum, and on the rate of reaction with hydrogen, graphite, and chalcogens.
Procedures of removal of a number of oxides under different conditions are
discussed.
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[4]. E. Kaldis. J. Crystal Growth 5 (1969), p. 376. Abstract
[5]. W. Palosz. J. Crystal Growth 61 (1983), p. 412. Abstract
[6]. E. Kaldis. In: (version 7 ed.),C.H.L. Goodman, Editor, Crystal Growth, Theory and Techniques Vol. 1, Plenum, New York (1974).
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[14]. F.R. Szofran, private communication.
* Universities Space Research Association.
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