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Journal of Crystal Growth
Volume 173, Issues 3-4 , 1 April 1997, Pages 427-439

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doi:10.1016/S0022-0248(96)00843-3    How to cite or link using doi (opens new window) Cite or link using doi  
Copyright © 1997 Published by Elsevier Science B.V.

Electronic material

Removal of oxygen from electronic materials by vapor-phase processes

Witold PaloszE-mail The Corresponding Author, *

NASA, Marshall Space Flight Center, Space Sciences Laboratory, ES75, Huntsville, Alabama 35812, USA

Received 22 July 1996;  accepted 27 September 1996. ; Available online 18 October 2001.


Abstract

Thermochemical analyses of equilibrium partial pressures over oxides with and without the presence of the respective element condensed phase, and hydrogen, chalcogens, hydrogen chalcogenides, and graphite are presented. Theoretical calculations are supplemented with experimental results on the rate of decomposition and/or sublimation/vaporization of the oxides under dynamic vacuum, and on the rate of reaction with hydrogen, graphite, and chalcogens. Procedures of removal of a number of oxides under different conditions are discussed.


References

[1]. E. Kaldis. J. Phys. Chem. Solids 26 (1965), p. 1701. Abstract

[2]. K.W. Benz and G. Müller. J. Crystal Growth 46 (1979), p. 35. Abstract

[3]. W. Palosz, K. Grasza, D. Gillies and G. Jerman. J. Crystal Growth 169 (1996), p. 20. Abstract | Abstract + References | PDF (686 K)

[4]. E. Kaldis. J. Crystal Growth 5 (1969), p. 376. Abstract

[5]. W. Palosz. J. Crystal Growth 61 (1983), p. 412. Abstract

[6]. E. Kaldis. In: (version 7 ed.),C.H.L. Goodman, Editor, Crystal Growth, Theory and Techniques Vol. 1, Plenum, New York (1974).

[7]. G.A. Bird, Molecular Gas Dynamics and the Direct Simulation of Gas Flows. , Clarendon, Oxford (1994).

[8]. S.A. Schaaf and P.L. Chambre, Flow of Rarefied Gases. , Princeton University Press, Princeton (1961).

[9]. R. Hultgren, Editor, Selected Values of the Thermodynamic Properties of the Elements, American Society for Metals (1973).

[10]. (version 7 ed.),G.V. Samsonov, Editor, The Oxide Handbook, Plenum, New York (1982).

[11]. R.H. Lamoreaux, D.L. Hildenbrand and L. Brewer. J. Phys. Chem. Ref. Data 16 (1987), p. 419. Abstract-INSPEC  

[12]. I. Barin and O. Knacke, Thermochemical Properties of Inorganic Substances. , Springer, Berlin (1974).

[13]. I. Barin, O. Knacke and I. Kubaschewski. In: (version 7 ed.),Thermochemical Properties of Inorganic Substances, Springer, Berlin (1977) Supplement .

[14]. F.R. Szofran, private communication.


* Universities Space Research Association.



This Document
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PDF (868 K)

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Journal of Crystal Growth
Volume 173, Issues 3-4 , 1 April 1997, Pages 427-439


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