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Heat treatments of ZnSe starting materials for physical vapor transport
Ching-Hua Sua,
*,
W. Palosz1,
a,
S. Feth2,
a
and S. L. Lehoczkya
a Space Sciences Laboratory, NASA
Marshall Space Flight Center, Huntsville, AL 35812, USA
Received 10
November 1997; accepted 9 February 1998. Available online 21 December 1998.
The effect of different heat treatments on stoichiometry and residual gas
pressure in ZnSe physical vapor transport system was investigated. The
dependence of the amount and composition of the residual gas on various heat
treatment procedures is reported. Heat treatment of ZnSe starting materials by
baking under the condition of dynamic vacuum to adjust its stoichiometry was
performed and the effectiveness of the treatment was confirmed by the
measurements of the partial pressure of Se2,
PSe2, in equilibrium with the heat treated samples.
Optimum heat treatment procedures on the ZnSe starting material for the physical
vapor transport process are discussed and verified experimentally.
(5K)
(L), with
the source temperature at 1080°C,
T =20°C and transport length
L=10 cm. The composition of the inert gas used in the calculation
was 35% CO2, 50% CO and 15% H2. The solid dots on the left
axis are the respective mass flux values assuming zero inert gas pressure.
(6K)
, at the highest experimental temperature
of each cell was labelled. The calculated Pse2 for
the congruent sublimation condition is also given.
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*Corresponding author. Fax: +1 205 544 8762.
1Universities Space Research Association.
2Raytheon STX Corp.
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