Abstract

Vapor transport of ZnO by PVT and CVT using carbon, carbon monoxide and hydrogen as the transport agents was studied. Theoretical calculations of the mass flux were based on equilibrium thermodynamics and 1D diffusional mass transport. Experimental results were found to be consistent with theoretical predictions. No apparent kinetic limitations to sublimation or CVT processes were observed. Slow reaction of carbon with ZnO source was found.

Keywords: A1. Mass transport; A1. Thermochemistry; A3. CVT; A3. PVT; B1. ZnO

PACS: 81.05.Dz; 81.10.Bk

Article Outline

1. Introduction

2. Theoretical calculations

2.1. Thermochemical models

2.1.1. ZnO– residual gas

2.1.2. ZnO–carbon monoxide

2.1.3. ZnO–carbon

2.1.4. ZnO–hydrogen

2.2. Computational procedures

3. Experimental procedures

4. Results and discussion

4.1. ZnO–residual gas

4.2. ZnO–carbon monoxide

4.3. ZnO–carbon

4.4. ZnO–hydrogen

5. Summary

Acknowledgements

References

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Fig. 1. Mass flux of ZnO by PVT as a function of residual gas pressure.

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Fig. 2. Mass flux of ZnO by PVT as a function of excess Zn pressure.

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Fig. 3. Mass flux of ZnO by CVT as a function of the pressure of CO as the transport agent.

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Fig. 4. Mass flux of ZnO by CVT as a function of CO pressure in the system of (ZnO+C).

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Fig. 5. Mass flux of ZnO by CVT as a function of the pressure of H₂ as the transport agent.

Table 1.
Residual gas and mass flux of ZnO in closed ampoules with CO

Experiment no.	Experimental mass flux (10−8 mole/cm2 s)	CO pressure (mbar at 1000 °C)	Theoretical mass fluxa (10−8 mole/cm2 s)
1		0.61
2		0.23
3	2.90	0.61b	2.32
		0.23c	0.91
4	1.33	0.61b	1.34
		0.23c	0.53
5	1.34	85	3.28 (4.0d)
6	0.72	724	1.02 (1.35d)

^a Assuming no excess Zn in the vapor.
^b Assumed after experiment 1.
^c Assumed after experiment 2.
^d After adjustment for changing pressure of CO.
Table 2.
Mass flux of ZnO in closed ampoules with hydrogen

Experiment no.	T(source)(°C)	(H2+H2O) pressure	Mass flux (10−8 mole/cm2 s)
		(mbar at 1000 °C)	Experimental	Theoretical
7	850	15→12a	10.6	33.0
8		31→25	6.3	35.8
9		930→750	9.0	10.6
10	950	100→70a	19.3	36.2
11		35→22	3.5	25
12	1050	600→400a	30.7	34.0
13		18→14	13.2	3.1

^a Calculated.

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