Growth and microstructure of MgO thin films on Si(100) substrates by metal-organic molecular beam epitaxy
F. Niu, B.H. Hoerman, B.W.Wessels
Applied Surface Science, 161, 74 (2000).
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Absract:
MgO thin films have been grown on Si(100) substrates by metal-organic molecular beam epitaxy using the solid precursor magnesium acetylacetonate. An oxygen plasma was used as the oxidant. The as-deposited films are phase-pure, stoichimetric polycrystalline MgO. Effects of the growth time, source flux, RF O plasma power on growth rate of the films were also investigated.